Octafluorocyclobutane is a colorless, odorless, non-flammable liquefied gas. It is shipped as a liquefied gas under its own vapor pressure (25 psig @ 70º F).
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Common Uses
Octafluorocyclobutane (C4F8) is a critical agent in the semiconductor industry, used extensively for plasma etching. In RF field applications, C4F8 generates reactive species that precisely etch silicon, facilitating the production of complex semiconductor devices. Furthermore, the radicals from C4F8 plasma can create a protective polymer on the sidewalls of etched features, safeguarding them from chemical attacks and ensuring their structural integrity.
C4F8 also plays a significant role in polymer production, serving as a dimer in the synthesis of high-performance fluoropolymers. These polymers are essential for various applications requiring exceptional chemical and thermal resistance.
EFC offers octafluorocyclobutane gas in a variety of purities and concentrations to meet the needs of the semiconductor and polymer industries. For more detailed information on our C4F8 products, including tanks and cylinders, please refer to the spec sheets and safety data sheets available below.
Octafluorocyclobutane is a chemical substance, a perfluorinated derivative of cyclobutane, colorless, odorless and stable.
Octafluorocyclobutane is obtained by dimerization of tetrafluoroethylene and reductive coupling of 1,2-dichloro-1,1,2,2-tetrafluoroethane.
Octafluorocyclobutane is used as deposition gas and etchant in the production of semiconductor materials and devices. It is also being studied as a refrigerant in special applications as an alternative to ozone depleting chlorofluorocarbon refrigerants. Taking advantage of its volatility and chemical inertness, octafluorocyclobutane may be present in some aerosolized foods. C4F8 was investigated as a possible replacement for sulfur hexafluoride as a dielectric gas.
C4F8 Gas Application
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Food packaging gas
A food additive, which is a (usually inert) gas used to encapsulate food during packaging, thereby protecting C4F8 Gas from unwanted chemical reactions during subsequent transport and storage, such as food spoilage or oxidation. The term includes propellant gas used to expel food from a container.
Food propellant
C4F8 Gas Propellant used to expel food from aerosol containers.
In addition, C4F8 is used for plasma etching in the semiconductor industry. In the RF field, C4F8 Specialty Gas produces reactive species that selectively etch silicon. During etching, C4F8 plasma radicals can form protective polymers that prevent chemical attack on features and can provide sidewall protection.
We offer Octafluorocyclobutane gas in various purities and concentrations. For more information on purchasing C4F8 Gases, see the table below and download the Spec Sheet and Safety Data Sheet.Please contact us!
Etching or cleaning gas in semiconductor production processes
Food aerosol propellant, medium gas
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